摘要
阵列化微镜设计可以实现微镜的高频工作。本文采用将驱动器隐藏在六边形镜面下方的设计方案来实现微镜阵列单元的制备,减小了微镜尺寸。在镜面内部引入了柔性结构匀散应力,降低微镜应力断裂风险,提高了微镜的可靠性,采用六边形密排的方式可以实现大于90%的占空比。所设计的微镜可以实现倾斜、偏转和活塞3种工作自由度,工作频率达到了23 000 Hz以上,共振偏转角度可以达到6.5°。对比传统的微镜阵列设计,本文设计提高了空间利用率和致动效率。
The arrayed micromirror design can realize high-frequency operation of micromirror.The design scheme of hiding the driver under the hexagonal mirror surface is used to realize the preparation of the micromirror array unit and reduce the size of the micromirror.A flexible structure is introduced inside the mirror to reduce the risk of micromirror stress fracture and improve the reliability of the micromirror.The hexagonal close-packed method can achieve a fill-factor more than 90%.The designed micromirror can achieve three degrees of freedom(DoF)of tilt,deflection and piston.The operating frequency can reach more than 23000Hz,and the deflection angle of harmonic response can reach 6.5°.Compared to traditional micromirror array,this design improves space utilization and actuation efficiency.
作者
张浩
汪洋
武震宇
ZHANG Hao;WANG Yang;WU Zhenyu(State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 201800,China;University of Chinese Academy of Sciences,Beijing 100049,China;Shanghai IndustrialμTechnology Research Institute,Shanghai 201800,China;School of Microelectronics,Shanghai University,Shanghai 201800,China)
出处
《传感器与微系统》
CSCD
北大核心
2024年第2期76-80,共5页
Transducer and Microsystem Technologies
基金
国家重点研发计划资助项目(2021YFB3202500)
上海市产业协同创新项目(HCXBCY—2021—044)。
关键词
微机电系统
压电驱动
微镜阵列
高频
micro-electro-mechanical system(MEMS)
piezoelectric drive
micromirror array(MMA)
high frequency
