压电加速度传感器电激励自校准方法研究

Study on Electrostatic Self-Calibration Method of Piezoelectric Accelerometer

为解决加速度计难以实现定期校准、校准成本高、难以满足长期工作需求等问题,对带有驱动端口的压电加速度传感器的自校准方法进行了研究。利用振动台校准方法以及基于驱动压电元件的逆压电效应,通过对传感器驱动端口电激励可实现驱动压电元件的转换灵敏度测试,并实现加速度计的现场原位校准。将校准结果与振动台校准方法的校准结果进行对比,实验结果表明,在频率范围5~10000 Hz,自校准灵敏度结果与振动台灵敏度校准结果一致,误差在±2%以内,验证了该方法的有效性。

In order to solve the problems of accelerometer difficulty in achieving regular calibration,high calibration cost,and difficulty in meeting long-term work needs,the self-calibration method of piezoelectric accelerometer with drive port is studied.The principle of self-calibration method simulating external vibration excitation and the conversion sensitivity laboratory measurement method of the internal drive piezoelectric element of the sensor are explained,and based on the inverse piezoelectric effect of the driving piezoelectric element,the on-site in-situ calibration of the accelerometer can be realized by the electrical excitation of the sensor drive port,and the calibration results of the shaker calibration method are compared.The experimental results show that in the frequency range 5~10000 Hz,the self-calibration sensitivity results are consistent with the vibration table sensitivity calibration results,and the error is within±2%,which verifies the effectiveness of the method.