机械刻划层分结构铝膜刀具磨损研究

Wear simulation of diamond cutting tools based on lamellar aluminium film

掌握机刻光栅刀具磨损机理是稳定制备大面积光栅的关键,由镀制工艺决定的具有层分结构铝膜是机刻光栅的首选膜坯。为获取光栅机械刻划过程中层分构铝膜对金刚石刻划刀具磨损影响规律,首次开展层分构铝膜力学性能测试与刀具刻划磨损规律研究,采用纳米压痕实验测得层分构铝膜硬度与弹性模量分别为0.48 GPa与65.2 GPa,满足Hall-Petch强化理论。据此,首次运用Deform 3D有限元分析软件建立层分构铝膜模型,将刻深位置设置在铝膜层分界面位置,分别对刻深在2μm与4μm的单层与4层铝膜进行刻划仿真后发现,分层膜界面对于其应力传递影响作用明显,且刻深突破第一、二层铝膜界面时,该界面对于应力传递的阻碍作用消失;不同刻深刻划单层和4层铝膜时刀具磨损形式与磨损部位大体相同,但刻划4层铝膜时刀具磨损较小,与后续机刻试验结果相符。

Mastering the tool wear mechanism is the key to the stable preparation of large area gratings.Aluminum film with layered structure determined by plating process is the first choice of film blank for machine gratings.In order to obtain the rule of the effect of the middle layer aluminum film on the wear of diamond cutting tools during the grating mechanical marking process,the mechanical properties of the layer aluminum film and the rule of tool marking wear were tested for the first time.The hardness and elastic modulus of the layer aluminum film were measured by the nanoindentation experiment,which were 0.48 GPa and 65.2 GPa respectively,meeting the Hall-Petch strengthening theory.Therefore,Deform 3D finite element analysis software was used for the first time to establish a layered layered aluminum film model,and the engraving depth was set at the aluminum film layer interface.It was found that the layered film interface had a significant effect on its stress transfer after the engraving depth of 2μm and 4μm for single-layer and 4-layer aluminum films.The barrier effect of the interface on stress transfer disappears;The tool wear pattern and wear position are roughly the same when cutting single and 4 layers of aluminum film,but the tool wear is small when cutting 4 layers of aluminum film,which is consistent with the results of subsequent machine cutting test.