摘要
阐述一种利用铂丝组成四臂电桥作为检测部分的有源皮拉尼规检测电路设计,它应用于中低真空领域,能够检测1x10^(-4)mbar真空度。电路采用铂丝作为采样电阻,UC34063作为恒流源供电电路。
This paper describes a design of an active Pirani gauge detection circuit that uses platinum wire to form a four arm bridge as the detection part.It is applied in the field of medium and low vacuum,and can detect 1x10^(-4)mbar vacuum degree.The circuit uses platinum wire as the sampling resistor and UC34063 as the constant current source power supply circuit.
作者
唐朝阳
景加荣
于佳佳
陈延龙
董栋
周旭
TANG Zhaoyang;JING Jiarong;YU Jiajia;CHEN Yanlong;DONG Dong;ZHOU Xu(Shanghai Yuda Industrial Co.,Ltd.,Shanghai 200240,China;Shanghai Satellite Equipment Research Institute,Shanghai 200240,China)
出处
《电子技术(上海)》
2023年第11期14-15,共2页
Electronic Technology