关于多晶硅生产装置中还原炉钟罩清洗工艺的研究

Research on Cleaning Process of Reduction Furnace Bell Jar in Polysilicon Production Unit

在生产多晶硅的还原工艺流程中,每次提炉后的还原炉筒钟罩内壁需进行清洗除污。为了解决钟罩内壁清洗除污不彻底的问题,采用调整清洗工艺的方法对同材质、同操作条件下的还原炉钟罩内壁的清洗效果进行对比研究,结果表明:同材质、同操作条件下的还原炉钟罩内壁清洗效果与清洗工艺有重大关联。本次研究有助于提高还原炉钟罩内壁洁净度,提高还原炉产品质量。

In the reduction process of polysilicon production,the inner wall of the reduction tube bell jar needs to be cleaned and decontaminated after each lifting.In order to solve the problem of incomplete cleaning and decontaminization of the inner wall of the bell jar,the cleaning effect of the inner wall of the bell jar of the reduction furnace under the same material and the same operating conditions was compared and studied by adjusting the cleaning process.This research can help to improve the cleanliness of the inner wall of the furnace bell jar and improve the quality of the furnace products.