摘要
A new kind of step-flow growth mode is proposed,which adopts sidewall as step source on patterned GaN substrate.The terrace width of steps originated from the sidewall was found to change with the growth temperature and ammonia flux.The growth mechanism is explained and simulated based on step motion model.This work helps better understand the behaviors of step advancement and puts forward a method of precisely modulating atomic steps.
基金
This work was supported by the National Key Research and Development Program of China(2022YFB2802801)
the National Natural Science Foundation of China(61834008,U21A20493)
the Key Research and Development Program of Jiangsu Province(BE2020004,BE2021008-1)
the Suzhou Key Laboratory of New-type Laser Display Technology(SZS2022007).
