准分子激光器用铜电极研究进展

Research Progress of Copper Electrodes for Excimer Lasers

文章通过分析准分子激光器用电极的腐蚀机理,重点介绍了铜合金电极在材料设计、组织调控和结构优化等方面的研究进展,并最终指出了准分子激光器用铜电极的改进方向。

By analyzing the corrosion mechanism of excimer laser electrodes,this paper focuses on the research progress of copper alloy electrodes in material design,microstructure control and structure optimization,and finally points out the improvement direction of copper electrodes for excimer laser.