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光电关联显微镜技术快速定位样品台的设计及应用

Design and Application of Rapid Positioning Sample Stage for Correlative Light and Electron Microscopy
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摘要 光电关联显微镜技术结合了光学显微镜与电子显微分析技术,可获得样品同一位置的光学图像和高分辨电子图像,以实现更全面准确的样品表征,因而被广泛应用于材料科学、光学工程等学科.相较于传统非联用技术,光电关联显微镜技术可快速获取同一区域样品对应的光学图像、电子图像以及光谱信息等样品特征.为此,通过微纳加工技术制备了带有快速定位功能的光电关联显微镜样品台,结合能谱定位系统实现特定区域样品快速定位、跨尺度多维度表征,对相关科研工作具有重要意义. The correlative light and electron microscopy combines optical microscopy and electron microscopy analysis techniques to obtain optical and high-resolution electronic images of the sample at the same location,enabling more comprehensive and accurate sample characterization,which is widely used in multiple disciplines including materials science and optical engineering.Compared to traditional non-associative techniques,the correlative light and electron microscopy could rapidly acquire the corresponding optical images,electronic images,and spectral information of the sample at the same location.Therefore,an correlative light and electron microscopy sample stage with fast localization was prepared by micro-nanofabrication technology,and combined with energy spectrum localization system to realize multi-dimensional and cross-scale characterization of samples in specific regions,which is of great significant to related scientific research.
作者 戴玉洁 常林 赵复庆 DAI Yujie;CHANG Lin;ZHAO Fuqing(Chongqing Institute of Green and Intelligent Technology,Chinese Academy of Sciences,Comprehensive Test Center,Chongqing 400714,China)
出处 《分析测试技术与仪器》 CAS 2024年第1期16-22,共7页 Analysis and Testing Technology and Instruments
基金 国家自然科学基金青年基金项目(52300115) 中国科学院创新项目(C23CDM10) 中国科学院仪器功能开发项目(G22CDM30) 中国科学院技术支撑人才项目(E3298202)。
关键词 光电关联显微镜技术 样品台 拉曼光谱 原子力显微镜 correlative light and electron microscopy sample stage Raman spectroscopy atomic force microscopy
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