基于加速度计的前馈补偿方法

A Feedforward Compensation Algorithm Based on Accelerometers

针对半导体设备在高精密高加速运动时光学负载的动力学特性受到机器内部噪声的激励产生振动,导致超精密运动台在该振动影响下运动误差变大的问题。运用加速度计对光学负载的模态信号进行实时采集与处理,设计一种基于加速度的前馈补偿方法,利用该方法精准确定谐振频点并使其产生有效衰减。以实验室设备为例,通过Matlab等软件进行数据处理与仿真验证,证明基于加速度计的前馈补偿方法能够有效地抑制光学负载振动对伺服误差的影响,提高超精密运动台的伺服精度。

In order to solve the problem that the dynamic characteristics of the optical load of semiconductor equipment are excited by the internal noise of the machine to produce vibration when the semiconductor equipment is moving in high-precision and high-acceleration motion,which leads to the large motion error of the ultra-precision motion table under the influence of vibration.The accelerometer is used to collect and process the modal signal of the optical load in real time,and a feedforward compensation method based on acceleration is designed,which is used to accurately determine the resonant frequency point and make it produce effective attenuation.Taking the laboratory equipment as an example,the data processing and simulation verification through Matlab and other software prove that the feedforward compensation method based on accelerometer can effectively suppress the influence of optical load vibration on the servo error and improve the servo accuracy of the ultra-precision motion table.