高精密运动台直线电机温度模拟与实验研究

Temperature Simulation and Experimental Research on Linear Motor of High Precision Stages

介绍了半导体装备领域高精密运动台直线电机组成,指出电机散热对运动精度的影响。通过实验验证了直线电机在180 W工况下采用代表性体积单元(RVE)模型得到的线圈等效导热系数的正确性,可以为不同工况下仿真计算直线电机的温升提供参考依据。通过直线电机表面温度的实验数据与仿真数据对比研究,二者线圈正面最大温度误差小于10%,冷却水出口温度误差为0.09‰。同时模拟了仿真模型和等效导热系数的相关性,为高精密运动台直线电机温度模拟提供了参考。

The composition of high-precision motion stages linear motors is introduced in this paper for the field of semiconductor equipment,and proposing the impact of motor heat dissipation on motion accuracy.The correctness of the motor coil equivalent of the motor coil is verified by experiments,which is obtained from the Representative Volume Element(RVE)model under 180W,and could provide a reference for the temperature simulation of the motor.Compared with the experimental data of the surface temperature of the linear motor and the simulation data,the maximum temperature error of the front of coils is less than 10%,the temperature error of the cooling water outlet is 0.09‰.The correlation between simulation model and equivalent thermal conductivity is simulated,which provides a reference for temperature simulation on the linear motor of high precision stages.