Gatan-695型离子减薄仪常见故障排除与维护

Common troubleshooting and maintenance of Gatan PIPS II 695 ion beam thinner

简要介绍了Gatan-695型离子减薄仪(简称“减薄仪”)的构造,并对设备的真空系统、样品台控制系统、气流控制系统等日常故障进行描述并提出排查方法,以及日常维护方法。为提高设备使用率,自主维护提供参考,更好的为教学、科研及社会服务。

This paper briefly introduces the structure of Gatan PIPS II 695 ion beam thinner instrument.The daily faults of the equipment such as vacuum system,sample stage control system,airflow control system and so on are described and the troubleshooting party is proposed,as well as routine maintenance methods.This article provides reference for improving equipment utilization,self-maintenance,and better serving teaching,scientific research and society.