某涂布设备微振动控制基础结构的优化设计

Prediction and Analysis of Influence of Subway Running in Curve Section on Vibration of Gymnasium

针对电子厂房内涂布设备结构楼板的微振动控制问题,提出了设备安置处楼板动刚度精细化控制方法。首先,对已建厂房内涂布设备所在基础楼板的振动速度响应及动刚度进行实测分析,确定设备满足其容许振动标准条件下的楼板需求动刚度;其次,建立楼板结构动力有限元模型,研究模型结构尺寸与动刚度计算值的差异;最后,通过计算获得满足涂布设备容许振动标准的楼板结构设计尺寸,并进行了工程验证。研究结果表明,涂布设备运行状态下1/3倍频程最大振动速度幅值对应的中心频率点为40 Hz或50 Hz,且在35.5~44.7 Hz频率范围对楼板需求动刚度要求最高。

A refined control method for the dynamic stiffness of the floor slab at the equipment placement location is proposed to address the micro vibration control problem of the coating equipment structure floor slab in the electronic factory building.Firstly,the vibration velocity response and dynamic stiffness of the foundation floor where the coating equipment is located in the built plant are measured and analyzed,and the required dynamic stiffness of the floor under the allowable vibration standard is determined.Secondly,the dynamic finite element model of the floor structure is established to explore the difference between the structural size of the model and the calculated value of dynamic stiffness.Finally,the design size of floor structure meeting the allowable vibration standard of coating equipment is obtained through calculation,and verified by engineering.The results show that the maximum vibration velocity amplitude of 1/3 octave frequency range corresponds to the central frequency point of 40 Hz or 50 Hz under the operation state of coating equipment,and the dynamic stiffness of floor slab is the highest in the frequency range of 35.5~44.7 Hz.