非晶合金薄膜的复合强韧化研究进展

Research Progress on Composite Strengthening and Toughening of Amorphous Alloy Thin Films

随着电子行业向便携化、智能化、柔性化方向不断发展,非晶合金薄膜由于强度和硬度高、耐磨损及耐腐蚀性好、表面粗糙度低等诸多性能优势,在微纳机电系统、传感器和生物医学方面显示出巨大的应用潜力,成为国内外炙手可热的高新技术材料之一。然而,剪切局域化和应变软化导致的室温脆性是非晶合金薄膜的致命问题,严重制约着其在结构工程领域中的广泛应用。因此,非晶合金薄膜的强韧化设计是目前的研究热点和前沿课题。近年来,随着生产工业和研发技术不断进步,各种新型非晶合金薄膜材料不断涌现。特别地,复合化具有高度的设计性和可控性,在非晶合金薄膜的强韧化研究方面得到广泛关注。本文回顾了非晶合金复合薄膜的几种主要结构设计策略,围绕“微观结构-力学性能-强韧化机制”的本构关系,重点阐述了不同微观结构对非晶合金薄膜力学性能和变形机理的影响,并对该课题研究进程中所面临的主要问题和挑战进行了展望。

With the continuous development of the electronics industry towards the direction of portability, intelligence and flexibility, amorphous alloy films have exhibited great application potential in micro-and nanoelectromechanical systems, sensors and biomedicine, owing to high strength and hardness, good wear and corrosion resistance, low surface roughness, and many other performance advantages. Thus they have become one of the most popular high-tech materials at home and abroad in recent decades. However, the brittleness at room temperature caused by shear localization and strain softening is a fatal problem for amorphous alloy films, which seriously restricts their wide application in the field of structural engineering. Therefore, strengthening and toughening of amorphous alloy films becomes research hotspot and frontier topic. In recent years, with the continuous development of production and research technology, a variety of new amorphous alloy film materials continue emerging. In particular, due to the high designability and controllability, composite has received extensive attention in the study of strengthening and toughening of amorphous alloy thin film. In this paper, we review several important structural design strategies of amorphous alloy composite films. Based on the constitutive relationship of ‘microstructure-mechanical property-strengthening and toughening mechanism’, we emphatically describe the influence of different microstructures on mechanical properties and deformation mechanisms of amorphous alloy films. The paper also includes a brief but prospective discussion on main problems and challenges in the research of this subject.