基于超快激光定域去除的Cu/Ag复合金属网格透明电极性能优化研究

Study on performance optimization of transparent Cu/Ag composite metal mesh electrode based on localized removal with ultrafast laser

[目的]Ag网格透明电极方块电阻低,但反射率高。[方法]在钠钙玻璃基底表面利用等离子射频磁控溅射沉积Cu/Ag复合金属薄膜,然后采用飞秒脉冲激光定域去除金属层,获得Cu/Ag复合金属网格透明电极。分析了激光能量密度、激光扫描速率和激光扫描线重叠率对电极材料去除的影响机制。[结果]在激光能量密度1.4 J/cm^(2)、激光扫描速率300 mm/s和激光扫描线重叠率70%的工艺参数下获得了综合光电性能最为出色的Cu/Ag复合金属网格透明电极,其平均透光率为87.58%,方块电阻为2.15Ω,品质因子为1.235×10^(-1)Ω^(-1)。[结论]该电极的综合性能与传统商用ITO(掺锡氧化铟)透明电极相比有巨大提升。

[Introduction]The transparent Ag mesh electrode has low sheet resistance but high reflectivity.[Method]A Cu/Ag composite metal film was deposited on the surface of soda-lime glass by plasma radio frequency(RF)magnetron sputtering,and then locally removed by femtosecond pulsed laser,forming a transparent Cu/Ag composite metal mesh electrode.The effects of laser fluence,laser scanning speed,and laser scanning line overlap ratio on the removal of electrode material were discussed.[Result]The transparent Cu/Ag composite metal mesh electrode fabricated at laser fluence 1.4 J/cm^(2),laser scanning speed 300 mm/s,and laser scanning line overlap ratio 70%exhibited an average optical transmittance of 87.58%,a sheet resistance of 2.15Ω,and a figure of merit of 1.235×10^(-1)Ω^(-1),showing the best photoelectric properties.[Conclusion]The comprehensive performance of the transparent Cu/Ag composite metal mesh electrode is much better than that of the commercial ITO(indium tin oxide)transparent electrode.