电子级磷酸的纯化精制技术发展现状与研究进展

Current status and research progress of purification technology of electronic grade phosphoric acid

电子级磷酸作为一种超高纯化学试剂,主要用于微电子行业中芯片的清洗与蚀刻,其纯度会显著影响电子元器件的成品率、电性能以及可靠性。然而,极低杂质(10^(-9)水平)的高端电子级磷酸,对于化工分离纯化技术的要求极高。从电子级磷酸在芯片清洗与蚀刻方面的应用出发,梳理了电子级磷酸产品的主要国内外标准,概述了杂质离子的主要分析监测方法。重点综述了电子磷酸的制备和纯化精制方法,特别是结晶法在磷酸深度净化方面的显著优势,最后,对电子级磷酸的净化技术发展做出了前景展望。

As a kind of ultra-high purity chemical reagent,electronic grade phosphoric acid is mainly used for chip cleaning and etching in the microelectronics industry,and its purity will significantly affect the yield,electrical performance and reliability of electronic components.However,high-end electronic grade phosphoric acid with extremely low impurities(10^(-9) level)has extremely high requirements for chemical separation and purification technology.Based on the application of electronic grade phosphoric acid in chip cleaning and etching,the main domestic and foreign standards of electronic grade phosphoric acid products are reviewed,and the main analysis and monitoring methods of impurity ions are summarized.The preparation and purification methods of electronic phosphoric acid are reviewed,especially the significant advantages of crystallization in purifying phosphoric acid.Finally,the prospect of purification technology of electronic phosphoric acid is prospected.