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熔融合金电流体直写制备高分辨率可回收电路

Electrohydrodynamic Direct Writing High-Resolution Recyclable Circuits by Using Molten Alloy
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摘要 可回收电路具有材料利用率高、成本低、工艺简单等优点,能够带来良好的经济效益,同时减少了对环境的污染,在绿色制造中具有重要意义,但传统印刷工艺难以满足其高分辨率、高附着力的制备要求。提出了一种熔融合金电流体直写制备高分辨率可回收电路的方法。通过实验验证了该方法的可行性,发现高温的熔融合金能使基板软化,并部分嵌入其中,具有较好的附着力。此外,探究了喷嘴工作距离、脉冲峰值电压以及基板运动速度这三个关键工艺参数对熔融合金电流体直写成型质量的影响规律。结果表明:当喷嘴工作距离为0.25 mm,脉冲峰值电压为2.5 kV,以及基板移动速度为4.0 mm/s时,熔融合金电流体直写成型质量最好,平均线宽约为70μm。最后,在聚酰亚胺(PI)基底上直写制备了高分辨率的可回收电路,并成功点亮了发光二极管,完成了电路的后续回收处理及循环利用工作,为熔融合金材料在可回收电子和绿色制造中的应用提供了新的途径。 Recyclable circuit has the advantages of high material utilization rate,low cost,simple process,etc.,which can bring good economic benefits and reduce environmental pollution,and is of great significance in green manufacturing.However,the conventional printing process is difficult to meet the preparation requirements such as high resolution and high adhesion.A fabrication method for high-resolution recyclable circuits by using electrohydrodynamic direct writing of molten alloy was presented.The feasibility of the method was verified by experiments.It is found that the high-temperature molten alloy can soften the substrate and is partially embedded in it with good adhesion.In addition,the influence laws of three key process parameters,such as nozzle working distance,peak pulse voltage and substrate moving speed on the forming quality of the electrohydrodynamic direct writing using molten alloy was investigated.The results show that when the nozzle working distance is 0.25 mm,the peak pulse voltage is 2.5 kV and the substrate moving speed is 4.0 mm/s,the forming quality of the electrohydrodynamic direct writing by using molten alloy is the highest,and the average line width is about 70μm.Finally,a high-resolution recyclable circuit was prepared directly on the polyimide(PI)substrate,the light-emitting diode was successfully lit,and the subsequent recovery and recycling utilization of the circuit were completed,providing a new way for the application of molten alloy materials in recyclable electronics and green manufacturing.
作者 廖鹏飞 潘艳桥 胡睿 汪方杰 杨翊 Liao Pengfei;Pan Yanqiao;Hu Rui;Wang Fangjie;Yang Yi(Hubei Provincial Key Laboratory of Mechanical Transmission and Manufacturing Engineering,School of Mechanical Automation,Wuhan University of Science and Technology,Wuhan 430081,China;Precision Manufacturing Research Institute,School of Mechanical Automation,Wuhan University of Science and Technology,Wuhan 430081,China;Key Laboratory of Metallurgical Equipment and Control of Ministry of Education,School of Mechanical Automation,Wuhan University of Science and Technology,Wuhan 430081,China;State Key Laboratory of Intelligent Manufacturing Equipment and Technology,Wuhan 430074,China)
出处 《微纳电子技术》 CAS 2024年第3期144-150,共7页 Micronanoelectronic Technology
基金 国家自然科学基金资助项目(51705380) 智能制造装备与技术全国重点实验室开放课题基金(IMETKF2023010)。
关键词 可回收电路 熔融合金 电流体直写 绿色制造 循环利用 recyclable circuit molten alloy electrohydrodynamic direct writing green manufacturing recycling utilization
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