面向光栅刻划机的负刚度结构隔振性能优化

Optimization of Vibration Isolation Performance of NegativeStiffness Structure for the Grating Ruling Machine

大面积光栅刻划机实验室存在的复杂振动因素,会对它的运行及刻画精度造成影响,针对光栅刻划机设计一种正负刚度并联的被动隔振结构,改善仅有空气弹簧时对低频隔振无效的现象,拓宽隔振频带。为模拟隔振器隔振性能,建立系统的动力学模型和动力学方程,使用仿真软件MATLAB进行仿真,为磁致负刚度弹簧进行尺寸结构设计,对比并联磁致负刚度弹簧前后的隔振效果。仿真结果表明采用空气弹簧和磁致负刚度结构并联后能够有效的隔离低频振动,并且磁吸致负刚度和磁斥致负刚度进行组合能够有效的改善单一磁吸致负刚度或磁斥致负刚度结构的非线性。

The complex vibration factors existing in the large area Grating Ruling Machine laboratory will affect its operation and characterization accuracy.A passive vibration isolation structure with positive and negative stiffness parallel is designed for the Grating Ruling Machine to improve the phenomenon that only air spring is invalid for low-frequency vibration isolation and broaden the vibration isolation frequency band.In order to simulate the vibration isolation performance of the isolator,the dy-namic model and dynamic equation of the system are established.The simulation software MATLAB is used to simulate the size structure of the magnetic negative stiffness spring,and the vibration isolation effect before and after the parallel magnetic nega-tive stiffness spring is compared.The simulation results show that the air spring and the magnetic negative stiffness structure in par-allel can effectively isolate the low-frequency vibration,and the combination of magnetic suction negative stiffness and magnetic repulsion negative stiffness can effectively improve the nonlinearity of single magnetic suction negative stiffness or magnetic repul-sion negative stiffness structure.