CPCA系列电容薄膜式绝压变送器校验装置的开发和应用

Development and Application of CPCA Series Capacitive Thin Film Absolute Pressure Transmitter Calibration Device

在核电、食品、半导体等涉及真空测量的行业中,CPCA系列电容薄膜式绝压变送器以其优良的性能,逐渐成为真空测量的主要仪表。各行业对真空测量仪表的需求越来越多,对精度要求也越来越高,随着工艺和技术的不断发展,面对复杂的现场工况,现有CPCA系列电容薄膜式绝压变送器的校验装置的精度和效率已经不能满足真空行业的生产需要。由于绝压变送器真空测量精度的准确高效关乎企业的产量及生产安全,因此研制一种满足要求的高精度、高效率的电容薄膜式绝压变送器的校验装置,彻底解决电容薄膜式绝压变送器校验精度和效率的难题,已经是我国真空行业的迫切需要。本文研制了一种CPCA系列电容薄膜式绝压变送器校验装置,通过对现有的校验装置进行设计改进,在效率、精度等方面有了极大的突破,达到了理想的现场使用效果,彻底解决了绝压变送器校验精度和效率的行业性技术难题。

In industries such as nuclear power,food,and semiconductors that involve vacuum measurement,the CPCA series capacitive thin-film absolute pressure transmitters have gradually become the main instruments for vacuum measurement due to their excellent performance.With the increasing demand for vacuum measurement instruments in various industries,higher precision requirements,and the continuous development of processes and technologies,on-site working conditions become more complex.The accuracy and efficiency of the existing calibration device for the CPCA series capacitive thin film absolute pressure transmitter can no longer meet the production needs of the vacuum industry.Due to the fact that accurate and reliable measurement of vacuum pressure is crucial for the production and safety of enterprises,the development of a high-precision and high-efficiency calibration device for capacitive thin film absolute pressure transmitters that meets the requirements has become an urgent need in China’s vacuum industry to thoroughly solve the problems of calibration accuracy and efficiency of capacitive thin film absolute pressure transmitters.The CPCA series capacitive thin film absolute pressure transmitter calibration device developed in this project has made great breakthroughs in efficiency and accuracy by improving the design of existing calibration devices.It has achieved ideal on-site use effects and thoroughly solved the industry wide technical problems of calibration accuracy and efficiency for absolute pressure transmitters.