基于PMNT晶片热释电型太赫兹探测器的设计与应用(特邀)

Design and Application of Pyroelectric Terahertz Detector Based on PMNT Chip(Invited)

针对太赫兹探测器的研究现状,分析研究了现有太赫兹探测器的优缺点,并对热释电型太赫兹探测器的热释电材料和吸收材料进行研究,提出了一种基于铌镁钛酸铅(PMNT)晶片的新型太赫兹探测器的设计和制作方法。用PMNT晶片作为热释电材料,碳纳米管作为吸收材料,使用精密减薄抛光工艺和溅射电极工艺等工艺技术,完成了新型热释电太赫兹探测器的设计与制作。并利用该探测器设计了一款太赫兹功率计,经测试,该功率计在0.1~30 THz宽频段、0.5~100 m W大功率动态范围内,功率测量准确度达到了±10%,综合指标达到国际同类产品先进水平,应用效果良好。

In view of the current research status of terahertz detectors,the advantages and disadvantages of ex⁃isting terahertz detectors are analyzed,and the pyroelectric materials and absorbent materials of pyroelectric tera⁃hertz detectors are studied.A new design and fabrication method of terahertz detectors based on PMNT chips is pro⁃posed.Using PMNT wafer as pyroelectric material,carbon nanotubes as absorption material,using precision thin⁃ning polishing technology and sputtering electrode technology,the design and manufacture of a new pyroelectric terahertz detector are completed.And using the detector designed a terahertz power meter,after testing,the power meter in 0.1~30 THz wide band,0.5~100 mW high power dynamic range,the power measurement accuracy reached±10%,the comprehensive index reached the international advanced level of similar products,the application effect is good.