星载迈克尔逊干涉仪扫描角镜装调工艺研究

Research on Scanning Angle Mirrors Assembly Technology for Spaceborne Michelson Interferometer

针对星载迈克尔逊干涉仪悬臂式扫描角镜组件装调维度多、装调精度高、检测困难等技术难点,提出了一种“向量解析+精密微动调整”方法,通过建立装调及检测基准、将角镜组件简化为空间点向量、采用“先法向后平面”的调整顺序、利用专用精密微动装置等措施,实现了空间多自由度角镜组件的高精度调整,角镜顶点位置对称度装调后达到8μm,优于0.01 mm的设计指标要求,有效提高了装调精度,缩短了装调周期。

Aiming at the technical difficulties of the cantilever scanning corner mirrors assembly of spaceborne Michelson interferometer,such as multi-dimension,high precision,difficult detection and etc.,a method of"vector analysis+precision micro-adjustment"was proposed,which included establishing the installation and detection benchmark,simplifying the angle mirrors to a spatial point vector,adopting the adjustment sequence of"first method to back plane"and using special precision micro-motion device,etc.And finally the high-precision adjustment of the spatial multi-degree-of-freedom angle mirrors assembly was realized.After the adjustment,the symmetry of the vertex position of the angle mirrors reaches 0.008 mm,which is superior to the design accuracy of 0.01 mm.The adjustment accuracy is improved effectively and the adjustment cycle is shortened.