基于4H-SiC的开槽四梁式压阻式加速度计设计及仿真研究

Design and Simulation of Slotted Four-beam Piezoresistivity Accelerometer Based on 4H-SiC

基于4H-SiC设计了一种开槽四梁式的压阻式加速度计,通过分析开槽位置、开槽大小对传感器灵敏度及固有频率的影响确定了开槽的相关参数,并对该结构采用有限元方法进行了热-力耦合仿真,确定了该结构在不同温度场下施加不同载荷时的理论电压输出。研究结果表明:该结构相较于传统双端四梁结构输出灵敏度提升51.4%,固有频率仅下降14.2%,在ANSYS 600℃的稳态温度场环境下,传感器输入载荷与输出电压成线性关系,理论满量程输出为39.71 mV。

A slotted four beam piezoresistive accelerometer based on 4H-SiC was designed.The relevant parameters of the slot were determined by analyzing the effects of slot position and slot size on sensor sensitivity and natural frequency.The thermal mechanical coupling simulation of the structure was carried out using finite element method,and the theoretical voltage output of the structure under different temperature fields under different loads was determined.The research results show that compared to the traditional double ended four beam structure,the output sensitivity of this structure is increased by 51.4%,and the natural frequency is only reduced by 14.2%.The sensor exhibits a linear relationship between input load and output voltage in a steady-state temperature field environment of ANSYS 600℃with a theoretical full scale output of 39.71 mV.