可检测有害气体的微纳电离型传感器的研究

Research on Micro Nano Ionization Sensor for Detecting Harmful Gases

有害气体浓度超标无时无刻不影响着经济效益和人类生命财产安全。为了准确测出这些有害气体的浓度,提出了一种新型检测技术,该技术通过对微纳电离型传感器的设计和制造实现。在室温常压、相对湿度70%的实验条件对多个浓度的苯、甲苯气体展开了测试,并基于特征噪声强度识别气体的浓度,构建了对应的识别模型。实验结果表明:传感器对有害气体检测时测量值和真实值的拟合度可达99%以上,体现了较高的检测精度,且在检测有害气体时传感器处于可逆电离平衡状态,重复性良好,不需要进行预热、安全无毒,因此适合于应用到苯类气体的检测中,能够满足效率、精度的要求,具备了一定的实用性。

The excessive concentration of harmful gases affects the economic benefits and the safety of human life and property all the time.In order to accurately measure the concentration of these harmful gases,a new detection technology is fulfilled through the design and manufacture of micro nano ionization sensors.Benzene and toluene gases with multiple concentrations are tested under the experi-mental conditions of room temperature,atmospheric pressure and 70%relative humidity,and the corresponding recognition model is con-structed based on the characteristic noise intensity to recognize the gas concentration.The experimental results show that the fitting de-gree of the measured value and the real value of the sensor for the detection of harmful gases can reach more than 99%,which reflects a high detection accuracy.When detecting harmful gases,the sensor is in a reversible ionization equilibrium state,with good repeatability,no preheating need,safety and being non-toxic.Therefore,it is suitable for the detection of benzene gases,can meet the requirements of efficiency and accuracy,and has certain practicality.