OLED车间蒸镀机基座替代性方案研究

Research on the Alternative Scheme for the Base of the OLED Plant Plating Machine

国内AMOLED产品已经量产的有京东方、天马微电子、华星光电、维信诺光电、和辉光电等数家企业。在AMOLED产品生产工艺中,蒸镀机的承重基座在建厂时会花费较高的建造成本及安装时间。结合实践,论证了一种蒸镀机承重基座的替代性方案在OLED行业的可使用情况。以求蒸镀机的替代性方案能使OLED行业的建厂成本减少和建厂时间压缩,可供类似厂建借鉴参考。

AMOLED products have been mass produced by BOE,Tianma Microelectronics,Huaxing Optoelectronics,Versino Optoelectronics,and Huiyang Optoelectronics,etc.In the production process of AMOLED products,the load-bearing base of the evaporator will take higher construction cost and installation time in the factory construction.Based on practice,this paper demonstrates the applicability of an alternative scheme of load bearing base for evaporator in OLED industry.It is hoped that the alternative scheme of evaporator can reduce the cost and time of OLED plant construction,which can be used as a reference for similar plant construction.