摘要
在引线键合工艺应用中,由于球焊键合工艺具有键合方向灵活、键合速度快等优势,在半导体芯片的封装互联领域被广泛应用。针对金丝球焊键合工艺中的近壁键合问题进行了研究,从键合方式、劈刀设计两个方面进行优化、改进,制定了两种不同的解决方案,并分析了两种方案的应用局限性。
In the application of wire bonding,the ball-wedge bonding is widely used in the field of packaging and interconnection of semiconductor chips due to its advantages such as flexible bonding direction and fast bonding speed.The near-wall bonding problem in the gold wire ball bonding process is studied,and two different solutions are formulated from the two aspects of bonding method and capillary design,and the application limitations of the two schemes are analyzed.
作者
张路非
晏海超
李席安
何学东
夏念
ZHANG Lufei;YAN Haichao;LI Xi’an;HE Xuedong;XIA Nian(GuiZhou ZhenHua QunYing Electric Appliance Co.,Ltd.,Guiyang 550000,China)
出处
《电子工艺技术》
2024年第2期29-32,36,共5页
Electronics Process Technology
关键词
引线键合
金丝球焊
近壁键合
深腔键合
复合键合
wire bonding
gold wire ball bonding
near-wall bonding
deep cavity bonding
composite bonding