Lamb波模态体声波压电谐振器仿真研究

Simulation Study on Lamb Wave Mode Bulk Acoustic Wave Piezoelectric Resonator

随着现代通信技术的发展,对高性能射频器件的需求愈加急迫。体声波(BAW)谐振器凭借其独特的优势,满足了高频应用领域的需求,成为当下射频器件中热门的研究方向之一。该文提出一种基于叉指电极的兰姆波S0模态BAW谐振器,并讨论了支撑锚结构和压电材料对器件的品质因数(Q)值的影响,仿真分析了4种锚结构和3种压电材料下器件的品质因数情况。同时基于仿真得到的氮化铝BAW谐振器单元,采用梯形级联方式得到频带在70.36~71.45 MHz的BAW滤波器,插入损耗>-1 dB,能够适用于高频窄带应用范围。

With the development of modern communication technology,the demand for high-performance RF devices becomes more and more urgent.BAW resonators meet the needs of high-frequency applications with their unique advantages and have become one of the hot research directions in the current RF devices.In this paper,a Lamb wave S0 mode BAW resonator based on interdigital electrodes is proposed,and the influence of supporting anchor structure and piezoelectric materials on the Q value of the device is discussed.The effects of the supporting anchors and piezoelectric materials on the quality factors of the device are discussed.The quality factors of devices with different four anchor structures and three piezoelectric materials are simulated and analyzed.At the same time,based on the aluminum nitride BAW resonator unit obtained by simulation,a BAW filter with a frequency band of 70.36-71.45 MHz is fabricated by trapezoidal cascade.The filter has the insertion loss of>-1 dB,which can be suitable for high-frequency and narrow-band applications.