离子氮化对高速钢表面类金刚石膜性能的影响

Effect of ion nitriding process on the properties of diamond-like carbon coating on high-speed steel surface

根据空心阴极原理,研究了离子氮化对高速钢表面渗氮层的厚度、硬度等影响.在此基础上,研究了气体体积配比对渗氮后高速钢表面沉积的类金刚石膜的结合力、sp3键含量和耐磨性能的影响.研究结果表明:离子氮化后,高速钢表面镀膜结合力明显提高,由10.35 N提高至18.56 N;降低气体体积配比中CH_(4)的含量有利于提高膜层中sp3键的含量,高速钢耐磨性能明显提升,摩擦系数由0.175降至0.1.离子氮化可有效提高高速钢表面沉积的类金刚石膜性能.

Based on the principle of hollow cathode,the influence of ion nitriding on the thickness and hardness of nitriding layer on the surface of high-speed steel was studied.On this basis,the effects of gas component on the binding force,sp~3 bond content and wear resistance of diamond-like film deposited on the surface of high-speed steel after nitriding were discussed.The results show that after ion nitriding,the surface coating bonding force of high-speed steel surface coating is significantly improved from 10.35 N to 18.56 N.Reducing the fraction of CH_(4)in the gas mixture is conducive to increasing the content of sp~3 bond in the film layer,and the wear resistance is significantly improved,whose friction coefficient is reduced from 0.175 to 0.1.Ion nitriding can effectively improve the properties of diamond-like film deposited on the surface of high-speed steel.