多弧离子镀沉积TiAlSiN涂层微观结构及力学性能分析
Analysis of microstructure and mechanical properties of TiAlSiN coating deposited by multi-arc ion plating
摘要
为开发适用于切削316L不锈钢的刀具涂层,现采用多弧离子镀技术在硬质合金基体上沉积TiAlSiN纳米复合涂层的方法,此方法可为该涂层体系进行不锈钢加工的深入研究提供参考。
参考文献3
-
1解志文,王小峰,黄磊,陆洋,闫久春.Si含量对多元等离子体浸没离子注入与沉积技术制备TiAlSiN涂层微结构和机械性能的影响(英文)[J].中国有色金属学会会刊:英文版,2011,21(S2):476-482. 被引量:4
-
2李佳,陈利,王社权.TiAlSiN多元PVD涂层的研究[J].硬质合金,2010,27(5):263-268. 被引量:19
-
3吴雁,王冰,肖礼军,王犁,张而耕,陈强,黄彪.Ti-Al-Si-N多层梯度涂层的微观结构及力学性能研究[J].表面技术,2021,50(2):232-237. 被引量:6
二级参考文献44
-
1TANAKA Y,,ICHIMIYA N,ONISHI Y,YAMADA Y.Structure and properties of Al-Ti-Si-N coatings prepared by the cathodic arc ion plating method for high speed cutting applications. Surface and Coatings Technology . 2001
-
2WILLMANN H,MAYRHOFER P H,PERSSON P O A.Thermal stability of AlCrN hard coatings. Scripta Materialia . 2006
-
3BENDAVID A,,MARTIN P J,PRESTON E W,CAIRNEY J,XIE Z H,HOFFMAN M.Deposition of nanocomposite thin films by a hybrid cathodic arc and chemical vapour technique. Surface and Coatings Technology . 2006
-
4KARVANKOVA P,VEPREK-HEIJMAN M G J,AZINOVIC D,VEPREK S.Properties of superhard nc-TiN/a-BN and nc-TiN/a- BN/a-TiB 2 nanocomposite coatings prepared by plasma induced chemical vapor deposition. Surface and Coatings Technology . 2006
-
5YU Dong-hai,WANG Cheng-yong,CHENG Xiao-ling,ZHANG Feng-lin.Microstructure and properties of TiAlSiN coatings prepared by hybrid PVD technology. Thin Solid films . 2009
-
6KIM S K,VINH P V,LEE J W.Deposition of superhard nanolayered TiCrAlSiN thin films by cathodic arc plasma deposition. Surface and Coatings Technology . 2008
-
7VEPREK S,PRILLIMAN S G,CLARK S M.Elastic moduliof nc-TiN/a-Si3N4 nanocomposites: Compressible, yet superhard. Journal of Physics . 2010
-
8VEPREK S,VEPREK-HEIJMAN M G J,KARVANKOVA P.Different approaches to superhard coatings and nanocomposites. Thin Solid films . 2005
-
9VAZ F,REBOUT L,ALMEID B,GOUDEAU P,PACAUD J.Structural analysis of Ti 1 x Si x N y nanocomposite films prepared by reactive magnetron sputtering. Surface and Coatings Technology . 1999
-
10RIBEIRO E,MALCZYK A,CARVALHO S,REBOUTA L,FERNANDES J V,ALVES E,MIRANDA A S.Effects of ion bombardment on properties of d.c. sputtered superhard (Ti, Si, Al)N nanocomposite coatings. Surface and Coatings Technology . 2002
共引文献25
-
1孔德军,付贵忠,张垒,王文昌.阴极弧离子镀TiAlSiN涂层的微观组织与性能[J].中南大学学报(自然科学版),2013,44(9):3645-3651. 被引量:7
-
2徐涛.硬质合金高端产品及新材料发展趋势分析[J].硬质合金,2011,28(6):395-402. 被引量:41
-
3李秀萍,余志明,陈响明,刘王平.硬质合金刀具ZrC涂层的沉积[J].硬质合金,2012,29(3):123-130. 被引量:3
-
4陈龙,严莹,何云,陈煜哲.硬质合金涂层刀片铣削AISI410不锈钢刀具寿命研究[J].硬质合金,2013,30(1):29-33. 被引量:9
-
5王少卿,陈响明,杜勇,王社权.Ti_(1-x)Al_xN涂层LPCVD过程模拟中的热力学计算[J].硬质合金,2013,30(6):297-301. 被引量:1
-
6李力,苏永要,王锦标.轻稀土对WC-10Co硬质合金表面PVD涂层微观结构与性能的影响[J].重庆文理学院学报(社会科学版),2014,33(5):1-4. 被引量:2
-
7赵毅湘,陈康华,祝昌军,王社权,汤爱民.涂层对钛合金高速切削加工性能的影响[J].硬质合金,2015,32(1):50-56. 被引量:6
-
8何照荣,孙志伟,宣征南,段志宏.TiAlSiN涂层增韧技术及抗氧化性研究进展[J].热加工工艺,2015,44(12):18-22. 被引量:3
-
9薛峰,曾祥才,吴春涛,周应涛.添加元素对TiAlN涂层性能影响的研究现状[J].工具技术,2015,49(10):15-19. 被引量:3
-
10张而耕,陈强.阴极电弧技术制备TiAlN与TiAlSiN涂层的性能研究[J].中国陶瓷,2015,51(11):15-19. 被引量:3
-
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-
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6孙启帆,林钟卫,刘博,章钢,李波,姚建华.超音速激光沉积Cu-Al_(2)O_(3)-石墨复合涂层微观结构及耐磨损性能[J].表面技术,2024,53(5):115-125.
-
7李灿民,董中林,夏正卫,张心凤,魏荣华.等离子增强磁控溅射制备TiCr基纳米复合涂层的显微组织和性能[J].真空,2024,61(2):10-15.
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-
9朱小波,李国猛,吴优.核电主泵氮化硅环金刚石涂层改性工艺及性能研究[J].电力设备管理,2024(1):69-71.
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