压电微动台数据驱动迭代前馈补偿与自适应抑振

Data-driven iterative feedforward compensation and adaptive vibration suppression of piezoelectric micro-motion stage

为消除压电驱动柔性微定位平台高精控制对平台不确定动力学模型的依赖性,提出了一种数据驱动无模型迭代前馈补偿和自适应陷波滤波结合的控制方法来提高平台的跟踪性能。首先,建立了数据驱动无模型迭代前馈控制器,提高系统对噪声和其他干扰的鲁棒性,同时,证明了在无模型迭代前馈作用下,连续参考输入跟踪误差的有界性和闭环系统的稳定性;其次,构建了自适应陷波滤波器来消除平台谐振的影响,对误差信号进行快速傅里叶变换,并设计谐振频率在线提取算法,实现对陷波滤波器参数的在线实时整定,来进一步提升轨迹跟踪精度;最后,利用所设计的无模型迭代前馈控制器和自适应陷波滤波器对压电微动台进行轨迹跟踪实验。实验结果表明:在跟踪三角波信号时,与单独比例-积分(Proportional Integral,PI)控制和结合自适应陷波滤波器的PI控制相比较,最大跟踪误差分别减小78.25%和70.83%,能够有效提升平台的稳定性和跟踪精度。

In order to eliminate the dependence of the high-precision control of the piezoelectric driven com⁃pliant micro-positioning stage on its uncertain dynamic model,a data-driven model-free iterative feedforward compensation and adaptive notch filtering control method were proposed to improve the tracking performance of the stage.Firstly,a data-driven model-free iterative feedforward controller is established to improve the robustness of the system to noise and other interferences,and at the same time,the boundedness of the track⁃ing error with continuous reference input and the stability of the closed-loop system under the action of modelfree iterative feed-forward are demonstrated.Secondly,an adaptive notch filter was constructed to eliminate the influence of stage resonance,a fast Fourier transform was performed on the error signal,and an online resonant frequency extraction algorithm was designed to realize the online real-time tuning of the notch filter parameters to further improve the trajectory tracking accuracy.Finally,the trajectory tracking experiment of the piezoelectric micro-motion stage was carried out by using the designed model-free iterative feedforward controller and adaptive notch filter.The experimental results show that when tracking the triangular wave signal,the maximum tracking error is reduced by 78.25%and 70.83%,respectively,compared with the PI controllor alone and the PI controllor combined with the adaptive notch filter,which can effectively improve the stability and trajectory tracking accuracy of the stage.