管式PECVD设备腔内大容量石墨舟力学性能的数值分析

NUMERICAL ANALYSIS OF MECHANICAL PROPERTIES OF LARGE CAPACITY GRAPHITE BOAT IN TUBULAR PECVD EQUIPMENT CAVITY

提高等离子体增强化学气相沉积(PECVD)法制备的氮化硅薄膜品质在太阳电池光电转换效率领域有举足轻重的作用。承载大量硅片的石墨舟是管式PECVD设备中的关键核心部件,随着生产效率的不断提升,热力耦合环境下腔内大容量石墨舟力学性能的稳定性引人关注。通过CAD软件建立石墨舟有限元模型并使用ANSYS仿真软件进行热力学仿真研究,综合分析其在高温条件下受力、受热后的变形情况。研究结果显示:结构自重是石墨舟形变及应力集中产生的主要因素,温度产生的影响并不明显;采用结构增强设计可有效提升石墨舟整体的力学性能。

Improving the quality of silicon nitride thin film prepared by Plasma Enhanced Chemical Vapor Deposition(PECVD)plays an important role in the field of photoelectric conversion efficiency of solar cells.The graphite boat carrying a large number of silicon wafers is the key core component of the tubular PECVD equipment.With the continuous improvement of production efficiency,the stability of mechanical properties of the large capacity graphite boat in the cavity under the thermo-mechanical coupling environment attracts attention.In this paper,the finite element model is established by CAD software and the thermodynamic simulation research is carried out by ANSYS simulation software to comprehensively analyze its deformation after stress and thermal under high temperature conditions.The research results show that the dead weight of the structure is the main factor causing the graphite boat deformation and stress concentration,and the influence of temperature is not significant.The structural reinforcement design can effectively improve the mechanical properties of the graphite boat.