原子级制造测量与表征研究现状综述

Overview of the Current Research in Measurement and Characterization for Atomic Level Manufacturing

原子级制造是指将能量作用于原子,通过原子级材料的可控去除或者原子/分子级结构的大规模操控及组装,实现产品性能与功能跃迁的前沿制造技术,是一种可以大规模、批量化的先进制造技术。该过程需要在10-10m空间尺度下精确操控原子。同时,制造过程中原子的键合时间、电子动力学变化均发生在飞秒(10-15s)至阿秒(10-18s)量级。因此,只有具备超快时间和空间分辨在线检测与表征能力,才能够深入了解并利用原子级制造过程中原子尺度的新原理、新效应,保障原子级制造的可达性与可控性;只有实现原子级制造过程的高通量、大范围的在线监测,才能保障原子级制造的可靠性。基于此,原子级制造的测量与表征是指在原子级的时间、空间、能量尺度上对材料、结构或器件进行精确的测量和表征,以保障原子级制造的可达性、可控性与可靠性。本文介绍了原子级制造所需的测量表征手段的研究现状,从原子级超快动力学过程观测、原子结构演变原位表征、原子级制造过程在线质量监测三大方向进行系统梳理,总结了目前原子级制造测量与表征的挑战并针对未来发展给出建议。

Atomic level manufacturing refers to the advanced manufacturing technology that applies energy to atoms directly,achieving controlled removal of atomic level materials or large-scale manipulation and assembly of atomic/molecular-level structures.This technology enables the leap in product performance and functionality.It is an advanced manufacturing technology that can be large-scale and mass-produced.Atomic level manufacturing requires precise manipulation of atoms at a spatial scale of 10~(-10)meters.The bonding time and electron dynamics changes of atoms during the manufacturing process occur in the range of femtosecond(10~(-15)seconds)to attosecond(10~(-18)seconds).Therefore,it is required to measure and characterize the atomic level manufacturing process with ultrafast time and ultra-space resolution for accurately understanding and utilizing the new principles and effects at atomic scale,ensuring the accessibility and controllablility of atomic level manufacturing;Achieving high throughput and large-scale online monitoring of the atomic level manufacturing process is essential to ensure its reliability.Therefore,atomic level manufacturing measurement and characterization refer to the precise measurement and characterization of materials,structures,or devices at the atomic level in terms of time,space,and energy scales.This is crucial to guarantee the accessibility,controllability,and reliability of atomic level manufacturing.This article introduces the state of the art of measurement and characterization methods for atomic level manufacturing,summarizes three important points for future research:observation of atomic level ultrafast dynamic processes,in-situ characterization of atomic structure evolution,and online quality monitoring of atomic level manufacturing processes.Current challenges in measurement and characterization of atomic level manufacturing and suggestions for future development are also discussed in the article.