磁控溅射制备高熵碳化物(AlTiVCrNb)C涂层摩擦学性能

Tribological Properties of High Entropy Carbide (AlTiVCrNb) CCoating Prepared By Magnetron Sputtering

为改善高熵合金涂层的摩擦学性能,通过石墨与AlTiVCrNb高熵合金靶共溅射制备(AlTiVCrNb)C涂层,采用扫描电子显微镜(SEM)、X射线衍射仪(XRD)分析涂层的成分、表截面形貌和物相,采用纳米压痕仪、球盘式摩擦磨损试验机测试涂层的硬度、弹性模量和摩擦学性能,采用白光干涉三维形貌仪表征涂层的磨损情况。试验结果表明:随着涂层中碳含量增加,高熵组分从BCC/FCC双相向单一FCC结构转变,且涂层的微观组织结构也随之变化;由于碳化物的形成和固溶强化,涂层呈现良好的摩擦学性能;在涂层碳原子分数为20.83%时,涂层的摩擦性能和力学性能达到最优,此时摩擦因数最低,为0.35,涂层硬度与弹性模量最高,分别为17.84、182.72 GPa。研究表明,在磁控溅射工艺中石墨与AlTiVCrNb高熵合金共溅射,可以获得摩擦学性能良好的高熵碳化物(AlTiVCrNb)C涂层。

In order to improve the tribological properties of high-entropy alloy coatings,(AlTiVCrNb)C coatings were prepared by co-sputtering of graphite and high-entropy alloy,and the tribological properties of(AlTiVCrNb)C coatings were studied.Scanning electron microscopy(SEM)and X-ray diffraction(XRD)were used to analyze the composition,surface morphology and phase of the film.The hardness,elastic modulus and tribological properties of the coatings were tested by nanoindentation and ball-on-disk friction and wear tester.The wear of the coating was characterized by white light interference three-dimensional topography instrument.The experimental results show that with the increase of carbon content of the coating,the high entropy component changes from BCC/FCC dual phase to single FCC structure,and the microstructure of the coating also changes.Due to the formation of carbides and solid solution strengthening,the coating exhibits good tribological properties.When the carbon atom fraction of the coating is 20.83%,the friction and mechanical properties of the coating are optimal,and the friction coefficient is the lowest of 0.35,the hardness and elastic modulus of the coating are the highest,which are 17.84 GPa and 182.72 GPa,respectively.It can be concluded that the high-entropy carbide(AlTiVCrNb)C coating with good tribological properties can be obtained by co-sputtering graphite and AlTiVCrNb high-entropy alloy in magnetron sputtering process.