音圈电机驱动微定位平台线性自抗扰滑模控制

Linear Disturbance Rejection Sliding Model Control of Voice Coil Motor-Driven Micro-Positioning Stage

针对音圈电机驱动柔性微定位平台控制速度和精度低以及抗干扰能力弱等问题,设计了一种将滑模控制和线性自抗扰控制相结合的复合控制器来提高平台系统的控制性能。首先,搭建了音圈电机驱动复合双平行四杆柔性机构的微定位平台和实验系统,并进行了系统辨识;其次,设计了线性自抗扰控制器,利用线性扩张状态观测器估计系统的内外扰动并在线进行扰动补偿,针对线性自抗扰控制器性能优化上的局限性,提出滑模控制器解决相位滞后问题来进一步提升轨迹跟踪精度;最后,利用所搭建的实验平台对控制方法进行了实验验证。结果表明,滑模和线性自抗扰复合控制器能够很好地克服内外干扰,与经典PID控制和单独的线性自抗扰控制相比,跟踪正弦波信号的最大误差分别减小了52.98%和21.26%,满足了微定位平台高精高速的控制要求。

Aiming at the problems of low control speed and accuracy and weak anti-interference ability of the flexible micro-positioning stage driven by voice coil motor,this paper designs a composite controller combining sliding mode control and linear active disturbance rejection control to improve the control performance of the platform system.Firstly,a micro-positioning platform and experimental system of voice coil motor driven composite dual-parallel four-bar flexible mechanism were built,and the system identification was carried out;Secondly,the linear active disturbance rejection controller is designed,and the linear expansion state observer is used to estimate the internal and external disturbances of the system and compensate for the disturbance online,aiming at the limitations of the performance optimization of the linear active disturbance rejection controller,the sliding mode controller is proposed to solve the phase lag problem to further improve the trajectory tracking accuracy;Finally,the experimental platform built was used to verify the control method.Compared with the classical PID control and the single linear active disturbance rejection control,the maximum error of tracking the sine wave signal is reduced by 52.98%and 21.26%,respectively,which meets the control requirements of high precision and high speed of the micro-positioning stage.