一种L~U波段RF MEMS单刀十掷开关的设计

Design of an L~U Band RF MEMS Single-blade 10-throw Switch

论文提出了一种适用于1GHz~60GHz频段的RF MEMS单刀十掷开关。该开关采用三角形上电极结构,以减小悬臂梁等效弹性系数和闭合接触面积,达到低驱动电压、高隔离度的目的。通过渐进传输线结构,改善阶跃补偿引起的信号损耗问题。仿真结果显示:该单刀十掷开关的驱动电压为13V,在1GHz~60GHz频段范围内,输入端两侧输出端口的插入损耗<2dB,其余八个端口插入损耗≤0.59dB,所有端口隔离度均>30dB。此开关可适用于无线通信系统、雷达系统和仪器测量系统等对射频性能要求高的领域内。

An RF MEMS single-blade 10-throw switch for the 1~60 GHz frequency band is proposed is this paper.The switch adopts a triangular upper electrode structure to reduce the cantilever beam equivalent elastic coefficient and closed contact area to achieve low drive voltage and high isolation.The signal loss problem is improved by step compensation by asymptotic transmission line structure is improved.The simulation results show that the drive voltage of this single-blade 10-throw switch is 13V.In the fre-quency range of 1GHz~60GHz,the insertion loss of the output ports on both sides of the input is<2dB,insertion loss of the remain-ing eight ports£0.59dB,and the isolation of all ports is>30dB.This switch can be used in wireless communication systems,radar systems and instrumentation measurement systems where high RF performance is required.