KDP晶体潮解抛光中相对速度的研究

Research on Relative Velocities in Deliquescent Polishing of KDP Crystals

基于KDP晶体潮解抛光原理对KDP晶体抛光过程进行运动学分析,得到KDP晶体表面上一点相对于抛光垫的速度表达式。在抛光垫转数、载样盘圆心与抛光垫圆心之间的水平距离、载样盘圆心与其摆动圆心之间的水平距离、KDP晶体表面上一点到载样盘圆心的水平距离取不同值时,分别绘制KDP晶体表面某点相对于抛光垫的速度曲线,得到这几个参数对相对速度的影响规律,并据此确定这些参数的优化方向。

The kinematic analysis of the deliquescent polishing process of KDP crystals is carried out based on the principle of deliquescent polishing,and the velocity expression of a point on the surface of the KDP crystal relative to the polishing pad is obtained.The velocity curves of a point on the surface of the KDP crystal relative to the polishing pad when the revolution of the polishing pad,the horizontal distance between the center of the sample holder and the center of the polishing pad,the horizontal distance between the center of the sample holder and the center of the oscillation circle,and the horizontal distance from a point on the surface of KDP crystal to the center of the sample holder took different values,are drawn respectively.The effect of these parameters on the relative velocity is obtained,and the optimization directions of these parameters are determined accordingly.