GaAs太阳电池中减反射薄膜的梯度折射率调控

Gradient Refractive Index Modulation ofAnti-reflective Coating in GaAs Solar Cells

使用溶胶凝胶法制备了TiO_(2)和SiO_(2)两种材料,结合梯度折射率的结构设计将不同比例的TiO_(2)/SiO_(2)沉积在GaAs太阳能电池上实现宽带减反射效果,最终制备的6层减反射薄膜在200~1 800 nm的波长范围内平均反射率为8.7%,同时确定了300℃的退火温度和1 000μm/s的提拉速度为制备薄膜的最佳工艺条件.

TiO_(2) and SiO_(2) materials were prepared using the sol-gel method.By combining the design of gradient refractive index,different ratios of TiO_(2)/SiO_(2) were deposited on GaAs solar cells to achieve a broadband anti-reflective effect.The finally prepared 6-layer anti-reflective film has an average reflectance of 8.7% in the wavelength range of 200~1800 nm.It was also determined that annealing at 300℃ and pulling speed at 1000μm/s are the optimal process conditions for preparing the film.