基于电光聚合物薄膜的芯片式光学硅基电场传感器传感及温度特性研究

Research on Sensing and Temperature Characteristics of Chip Type Optical⁃Silicon⁃based Electric Field Sensor Based on Electro⁃optical Polymer Film

“双碳”背景下,新型电力系统的数字化转型对电力传感技术提出了更高的要求。文中针对光学电场传感器温度稳定性差的问题,提出了基于电光聚合物薄膜的芯片式光学硅基电场传感器。首先介绍了电光效应原理,电光聚合物的2阶非线性光学效应以及电光能量耦合方法,其次设计了传感器的加工流程并完成了制备,同时在敏感芯片上成功涂覆电光聚合物,最后通过搭建实验测试平台,完成了传感器的线性度、交流响应以及温度特性测试。实验结果表明,所制备的光学电场传感器在工频电场下拥有较好的线性度且灵敏度高达0.945 mV·(kV·m^(-1))^(-1),传感器在0~75℃温度范围内输出幅值及相位稳定,其幅值比最大波动为0.481 dB,相位差最大为3.82°。文中提出的传感结构切实可行地提升了光学硅基集成电场传感器的温度特性,为硅基集成光学电场传感器在电力系统中的使用提供参考方案。

Under the background of‘dual Carbon’,the digital transformation of the new power system places higher demands on power sensor technology.In view of weak temperature stability of optical electric field sensor,a chip type optical silicon based electric field sensor based on electro-optical polymer film is proposed in this paper.Firstly,the principle of electro-optical effect,the second-order nonlinear optical effect of electro-optical polymer and the elec-tro-optical energy coupling method are introduced;Then,the processing flow of the sensor is designed and the prepa-ration is finished and,at the same time,the electro-optical polymer is successfully coated on the sensitive chip;Fi-nally,the linearity,AC response and temperature characteristic of the sensor are carried out by setting up the experi-mental test platform.The experimental results show that the prepared optical electric field sensor has good linearity and high sensitivity up to 0.945 mV·(kV·m^(-1))^(-1) under the power frequency electric field,and both output amplitude and phase of the sensor are stable in the temperature range of 0-75℃,with the maximum fluctuation of the amplitude ratio of 0.481 dB and the maximum phase difference of 3.82°.The structure of the sensor proposed in this paper prac-tically and feasibly improves the temperature characteristics of the silicon-based integrated optical electric field sen-sor,and provides a reference for the use of silicon-based integrated optical electric field sensors in power systems.