摘要
SECS/GEM标准是用于管理制造设备和工厂主机系统之间通信的半导体行业标准。通过介绍了SECS/GEM系统的构成,详细叙述了GEM的通讯状态模型,控制状态模型和设备状态模型,结合减薄的实际应用需求,列举了状态数据,事件发送和报警收集等功能的实现;表明GEM通信标准在减薄设备中有很好应用。
SECS/GEM standard is a semiconductor industry standard used to manage communication between manufacturing equipment and factory host systems.By introducing the composition of SECS/GEM system,the communication state model,control state model and device state model of GEM are described in detail,and combined with the practical application requirements of thinning,the implementation of functions are listed such as state data,event sending,and alarm collection,etc.The result indicates that GEM communication standard has a good application in thinning equipment.
作者
周丹
谢贵久
张文斌
刘宇光
ZHOU Dan;XIE Guijiu;ZHANG Wenbin;LIU Yuguang(The 45^(th) Research Institute of CETC,Beijing 100176,China;CETC Beijing Electronic Equipment Co.,Ltd.,Beijing 100176,China)
出处
《电子工业专用设备》
2024年第2期63-67,共5页
Equipment for Electronic Products Manufacturing
关键词
半导体设备通讯标准
设备状态模型
事件数据收集
Semiconductor equipment communication standards(SECS)
Device state model
Event data collection
