制备周期有序ZnO纳米棒阵列的影响因素研究

Investigation on influence factors of fabricating periodically ordered ZnO nanorod arrays

为研究ZnO纳米棒阵列的影响因素,通过聚苯乙烯(polystyrene,PS)纳米球刻蚀法及随后水热生长,在GaN衬底上制备周期有序的ZnO纳米棒阵列。通过选取不同尺寸的PS纳米球、反应离子刻蚀(RIE)的时长、生长温度和前驱体溶液浓度等条件,制备出具有不同周期性、不同形貌的ZnO纳米棒阵列,并通过XRD进行表征。研究结果表明:制备的ZnO纳米棒具有良好的结晶质量且沿着[0001]晶向优先生长。该研究调控了周期有序ZnO纳米棒阵列生长的影响因素,为制备半导体材料有序纳米阵列提供了一种低成本的方法。

In this paper,p Periodically ordered ZnO nanorod arrays were fabricated on GaN substrates by polystyrene(PS)nanosphere lithography and subsequent hydrothermal growth to investigate the factors to influence the growth of ZnO nanorod arrays.The periodicity and morphology of ZnO nanorod arrays were diverse by changing the factors such as the sizes of PS nanospheres,the duration of reactive ion etching(RIE),growth temperature,concentration of precursor solution and so on.The XRD results displayed that the ZnO nanorods preferentially grew along the[0001]crystal orientation with good crystalline quality.This work has studied the influence factors of fabricating periodically ordered ZnO nanorod arrays,which provides a relatively low-cost method for the fabrication of ordered nanoarrays of semiconductor materials.