摘要
柔性电容式压力传感器具有低能耗、高灵敏度、高稳定性等优点,在可穿戴设备、电子皮肤等柔性电子领域受到广泛关注。概述了以复合介电层和微结构设计为代表的柔性电容式压力传感器灵敏度提升方法,并介绍了柔性电容式压力传感器在追求高灵敏度和宽检测范围方面通常采用的多级复合结构、复合机制和混合响应策略,最后对柔性电容式压力传感器发展趋势进行了展望。
Flexible capacitive pressure sensors have attracted wide attention in the field of flexible electronics such as wearable devices and electronic skins due to their advantages of low energy consumption,high sensitivity and high stability.The sensitivity improvement methods of flexible capacitive pressure sensors represented by composite dielectric layer and microstructure design are summarized.The multi-stage composite structure,composite mechanism and hybrid response strategy commonly used in the pursuit of high sensitivity and wide detection range of flexible capacitive pressure sensors are introduced.The development trend of flexible capacitive pressure sensors is prospected.
作者
党新玉
段沐荣
吴蓓
孙润军
王秋实
DANG Xinyu;DUAN Murong;WU Bei;SUN Runjun;WANG Qiushi(Key Laboratory of Functional Textile Materials and Products,Ministry of Education,Xi′an Polytechnic University,Xi′an 710048,China;Xinjiang Production&Construction Corps Key Laboratory of Modern Textile Materials and Technology,Tarim University,Alaer 843300,China)
出处
《印染》
CAS
北大核心
2024年第4期72-77,共6页
China Dyeing and Finishing
基金
西安工程大学2024年度研究生创新基金项目(chx2024004)
塔里木大学校长基金项目(TDZKSS202116)
现代纺织材料与技术兵团重点实验室开放资助课题(TDFZKF202401)。
关键词
电容式压力传感器
结构设计
性能优化
灵敏度
研究进展
capacitive pressure sensor
structural design
performance optimization
sensitivity
research progress
