压流膜阻力对超微量点胶过程的影响及胶液转移率预测方法

Effect of Pressure Flow Film Resistance on Ultra-Micro Dispensing Process and Prediction Method of Glue Transfer Rate

超微量点胶技术是微纳制造技术发展中的关键环节,对封装效果起着决定性作用。然而,这项技术存在精度不高和控制困难等问题,需要进一步研究和改进。因此,基于胶液转印机制,根据液桥挤压模型得到压流膜阻力的数学模型,利用公式法和扫描法确定了胶滴体积,研究和预测了压流膜阻力对胶液转移率的影响,实现了pL量级的胶液转移。实验结果表明,压流膜阻力在胶液转移过程中起重要作用,随着压流膜阻力由0.5 mN增大至4 mN,接触面积从0.5×10^(4)μm^(2)左右增加至2.0×10^(4)μm^(2)以上,胶液转移率从约0.4增加至约0.8。除此之外,通过胶液转移率预测公式预测的胶液转移率与实际结果的平均差异率为2.18%,证明了胶液转移率预测方法的可行性。

Ultra-micro dispensing technology is a key link in the development of micro-nano manufacturing technology,and plays a decisive role on the packaging effect.However,the technology has issues such as low accuracy and control difficulty,requiring further research and improvement.Therefore,based on the glue transfer mechanism and liquid bridge extrusion model,a mathematical model of the pressure flow film resistance was obtained.Formula method and scanning method were used to determine the glue drop volume,and the impacts of the pressure flow film resistance on glue transfer rate were studied and predicted,and the glue transfer at pL level was achieved.Experimental results show that the pressure flow film resistance plays an important role in the glue transfer process.As the pressure flow film resistance increases from 0.5 mN to 4 mN,the contact area increases from about 0.5×10^(4)μm^(2)to more than 2.0×10^(4)μm^(2),and the glue transfer rate increases from about 0.4 to about 0.8.In addition,the average difference rate between the glue transfer rate predicted by glue transfer rate prediction formula and experiment result is 2.18%,which proves the feasibility of the glue transfer rate prediction method.