基于差热式原理的液体微/纳流量计设计与开发

Design and development of liquid micro/nano flowmeters based on differential thermal principle

基于MEMS技术的差热式超微小液体流量传感器具有测试流量极低、体积小、精度高、可实时监测等特点,近年来在现代精密分析科学仪器和微流控技术等领域获得广泛应用。本工作基于差热式液体流量传感器成功设计了满足μL/min~nL/min级液体流量准确测量的5款微纳流量计,输出流量数据稳定且准确性高,精度均小于0.5%。另外,开发了配套流量监控软件,可以实时采集流量数据,记录保存,实现平均流量、流量脉动率等定量计算功能。

The differential thermal ultra-micro liquid flow sensor based on MEMS technology has the characteristics of extremely low flow rate,small size,high precision,and real-time monitoring.It has been widely applied in modern precision analytical scientific instruments and microfluidics technology in recent years.Five micro/nano flow meters were successfully designed based on differential thermal liquid flow sensor in this article,the requirements for accurate measurement of liquid flow rate were met withμL/min to nL/min levels,with stable and high accurate output flow data,the accuracy was less than 0.5%FS.And a supporting flow monitoring software were also developed,which could collect real-time flow data,record and save it,and achieve quantitative calculation functions such as average flowrate and flow pulsation rate.