新型深紫外非线性光学晶体研究进展(特邀)

Research Progress of New Deep Ultraviolet Nonlinear Optical Crystals(Invited)

深紫外非线性光学晶体通过非线性光学效应改变激光频率,输出波长短于200 nm的深紫外激光,是全固态深紫外激光源的核心材料,在深紫外激光光刻、半导体芯片缺陷检测、高端科研装备等领域有重要的应用价值。近年来,新型深紫外非线性光学晶体材料的研究取得了系列进展,涌现出若干具有应用前景的候选材料。本文着重介绍基于实验测得的折射率,相位匹配波长达到深紫外区的晶体材料,综述其在材料设计、晶体制备、基本性能和结构-性能关系等方面的研究进展,探讨了实用化深紫外非线性光学晶体材料的发展趋势。

Deep ultraviolet nonlinear optical crystals are the core materials of all-solid-state deep ultraviolet laser sources,which can change the laser frequency through nonlinear optical effects and output deep ultraviolet lasers with wavelengths shorter than 200 nm.They have important application values in deep ultraviolet laser lithography,semiconductor chip defect detection,high-end scientific research equipment and other fields.In recent years,a series of progress has been made in the research of new deep ultraviolet nonlinear optical crystal materials,and candidate materials with excellent comprehensive performance have emerged.This paper focuses on the crystal materials with experimentally measured refractive index and phase-matching wavelength reaching the deep ultraviolet region,summarizes the research progress in material discovery,crystal preparation,basic properties,and structure-property relationship,and discusses the development trend of practical deep ultraviolet nonlinear optical crystal materials.