材料表面微图案结构成型技术及其研究进展

Forming technology and research progress of material surface micropattern structure

表面微图案结构成型技术作为实现材料表面纹理化并促进材料先进化、功能化的一种手段已经广泛应用到实际生产制造中。根据材料应用领域的差异,表面微图案成型的主要方法包括热压花、化学蚀刻、电火花加工、光刻和3D打印。本文综述了不同表面微图案结构成型技术及制备表面纹理化功能材料的基本原理,并列举其在光伏、电子信息、智能制造、超精密制造等领域的实际应用。总结了不同表面微图案结构成型技术的特点及适用范围,提出了实现材料表面纹理化和功能化所面临的关键问题,为表面微图案结构的微加工技术提供了一定参考。

The forming technology of surface micropattern structure was widely used in practical manufacturing as a means to texture the surface of materials and to promote advanced and functional materials.The main methods of surface micropattern forming include hot embossing,chemical etching,electrical discharge machining(EDM),photolithography and 3D printing depending on the application areas of materials.The different surface micropattern structure forming techniques and the basic principles of preparing surface texturise functional materials were reviewed,and their practical applications in photovoltaics,electronic information,intelligent manufacturing,ultra-precision manufacturing and other fields were listed.The characteristics and scope of application of different surface micropattern structure forming technologies are summarized,and the key problems faced in realizing the surface texturisation and functionalization of materials are put forward,which provides certain reference for the micromachining technology of surface micropattern structures.