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Acousto-optic scanning multi-photon lithography with high printing rate

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摘要 As a manufacturing method that is focused on end-users,3D printing has gained a lot of attention in recent years due to its unique advantages in fabricating complex three-dimensional structures.Various new micro-nano 3D printing methods have been developed to meet the demand for high-precision and high-yield manufacturing1-9.Among them,multi-photon-photon lithography(MPL) is a promising 3D nanofabrication technology due to its capability of true 3D digital processing and nanoscale processing resolution beyond the diffraction limit.It has been widely used to fabricate microoptics10,11,photonic crystals12,microfluidics13,meta-surfaces14,and mechanical metamaterials15.
作者 Minghui Hong
出处 《Opto-Electronic Advances》 SCIE EI CAS CSCD 2024年第2期1-3,共3页 光电进展(英文)
关键词 PHOTON Acous SCANNING
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