基于离子液射流定域电沉积的微镍柱成形研究

Research on Forming Process of Micro-nickel Columns Based on Ionic Liquid Jet Localized Electrodeposition

为提高定域电沉积三维金属微结构的加工效率和质量,采用离子液射流定域电沉积方式制备直径50~100μm、高度450~500μm的微镍柱,探究了工艺参数对沉积速率、微镍柱直径和微观形貌的影响。结果表明,在选定的参数范围内,微镍柱直径和沉积速率随着电压的增大同时增大,占空比对微镍柱沉积速率的影响高于对平均直径的影响,而脉冲频率对于微镍柱沉积速率影响不大。通过体式显微镜观察微镍柱微观形貌呈尖端效应,表明在阳极尖端半径对应区域和离子液射流范围内的共有区域具有电沉积定域性和优先性。合理控制阳极运动轨迹,调节参数为极间电压4.4 V、占空比50%、脉冲频率10 kHz时,可获得轮廓平直、表面致密的直径为61μm微镍柱。

In order to improve the fabricating efficiency and quality of localized electrodeposited 3D metal microstructures,the micro-nickel columns of diameter of 50~100μm and height of 450~500μm were fabricated by ionic liquid jet localized electrodeposition.The influence of pulsed current parameters on the depositing rates,morphology and diameter of micro-nickel columns were investigated to evaluate the quality of deposited columns in this paper.The result showed that within the selected parameter range,the diameter and deposition rate of micro-nickel columns increased simultaneously with the increase of interelectrode voltage range.The influence of the duty cycle on the deposition rate was higher than that on the average depositing diameter,and the pulse frequency has no significant variation on the deposition rate.The tip effect on the micro-nickel columns microscopic morphology was observed by the stereo microscope,which indicated there is localization and priority of deposition in common area that the corresponding area to the radius of the anode tip and the range of the ion liquid jet.The micro-nickel column which is more straight and compact with a diameter of 61μ.m,can be deposited by controlling the trajectory of anode motion and adopting the optimized parameters including interelectrode voltage of 4.4 V,duty eycle of 50% and pulse frequency of 10 kHz.