基于碳纳米管电子源的高稳定电离真空计的性能研究

Performance Investigation of a Highly Stable Ionization Gauge Based on Carbon Nanotube Electron Source

文章将碳纳米管电子源应用于高稳定电离真空计,通过结构和电参数优化,研制了样机,并开展了样机计量特性的实验研究,研究结果表明,新型电离规在6.87×10^(-6)Pa~6.45×10^(-5)Pa的压力范围内,灵敏度在0.200 Pa^(-1)~0.245 Pa^(-1)的范围内波动,与仿真灵敏度0.250 Pa^(-1)的偏差最大为20%,灵敏度波动小于5.96%,证明该结构设计合理,有望应用于超高真空校准及精确测量领域。

In this paper,a carbon nanotube electron source is applied to a highly stable ionization gauge,and a preliminary performance experimental study of the prototype is carried out.The results show that the sensitivity of the novel ionization gauge fluctuates in the range of 0.200 Pa^(-1)~0.245 Pa^(-1)from 6.87×10^(-6)Pa to 6.45×10^(-5)Pa,with a maximum deviation of 20%from the simulated sensitivity of 0.250 Pa^(-1),and the sensitivity fluctuation is less than5.96%,which proves that the structure is well-designed and is expected to be applied to high vacuum calibration and precise measurement.