基于导电岛系统的敏感元件制造方法研究

Research on manufacturing method of sensitive components based on conductive-island system

本文基于特征角度为60°的导电岛微电极系统,探究低频条件下交流介电泳驱动金纳米粒子形成。首先,利用剥离(lift-off)方法制作了特征角度为60°的导电岛微电极系统,并基于该系统进行了纳米粒子介电组装实验,发现纳米粒子在低频范围内会形成纳米粒子短链或短簇结构;然后,基于电双层理论,分析了低频时交流电渗流(ACEO)对介电流动的影响,发现低频时电双层现象能够在一定程度上削弱流体中的电场和介电流动;最后,针对驱动频率为100 kHz的粒子轨迹分析发现该情况更易产生纳米粒子簇,较好地符合实验现象。

Based on the conductive-island microelectrode system with a characteristic angle of 60°.Generation of gold nanoparticles driven by AC dielectrophoresis(DEP) at low-frequency is explored.Firstly,conductive-island microelectrode system is fabricated by lift-off process with a characteristic angle of 60°.Dielectrophoretic assembly experiments of nanoparticles are carried out based on this system.It is found that nanoparticles will form short chains or clusters structure of nanoparticles in low-frequency range.Then,based on the electric double-layer theory,the influence of alternating current electroosmosis(ACEO)on electrokinetic fluid at low-frequency is analyzed.It is found that the electric double-layer phenomenon at low-frequency can weaken the electric field and dielectrophoretic flow in electrokinetic fluid to a certain extent.Finally,based on analysis of the particle trajectory with the driving frequency of 100 kHz,it is found that this situation is more likely to produce nanoparticle clusters,which is in good agreement with the experimental phenomenon.