基于热电堆的微型热流传感器制备及性能研究

Preparation and performance study of miniature heat flux sensor based on thermopile

航空发动机内部温度和热辐射的不均匀分布可能导致叶片表面出现热点,引起叶尖等区域的材料损坏。因此,监测单位时间内通过叶片表面的热量十分重要。热电堆型热流传感器以其测量范围广、稳定性好、精度高等优点,成为监测高温环境热流参数的常用方法。本文采用丝网印刷和高温烧结工艺,在10 mm×10 mm×1 mm的99%Al_(2)O_(3)陶瓷基片上制备了Pt-Rh10/Pt热电堆型热流传感器,并搭建了热流实验平台对传感器进行测试。结果表明,该热流传感器在1 019.4℃的高温环境下,所测热流密度为179.67 kW/m^(2),输出电压为0.462 3 mV。经过3次热循环测试可知,该热流传感器的重复性偏差小于5%,具有较好的重复性。

The non-uniform distributions of temperature and thermal radiation inside aero-engine may lead to hot spots on the blade surface,causing material damage in regions such as the blade tip.Therefore,it is very important to monitor the heat passing through the blade surface per unit time.Thermopile-type heat flux sensor has become a common method for monitoring the heat flow parameter in high-temperature environment due to its advantages such as wide measurement range,good stability,and high precision.A Pt-Rh10/Pt thermopile-type heat flux sensor is fabricated on a 99 % Al_(2)O_(3) ceramic substrate of 10 mm×10 mm×1 mm by screen printing and high-temperature sintering process,and a heat flux experimental platform is built to test the sensor.The results show that the measured heat flux density is 179.67 kW/m^(2) and the output voltage of the heat flux sensor is 0.462 3 mV at a high-temperature environment of 1 019.4 ℃.After three thermal cycle tests,it can be seen that the repeatability deviation of the heat flux sensor is less than 5 %,and it has a good repeatability.