MEMS磁电耦合矢量水声传感器研制

Research and fabrication on MEMS magnetoelectric vector hydrophone

本文提出了一种基于磁电耦合原理和MEMS加工工艺的矢量水声传感器。该矢量水声传感器的MEMS敏感检测单元包括磁电耦合材料、八悬臂梁-中心质量块MEMS元件和永磁铁。采用电荷放大信号处理电路处理敏感检测单元产生的信号。通过对磁电耦合材料、MEMS元件和信号处理电路进行设计,使矢量水声传感器在工作时具有很高的灵敏度。通过声学灌封完成矢量水声传感器的制备,并对矢量水声传感器的性能进行了测试,测试结果表明:该矢量水声传感器的接收灵敏度在1 000 Hz时达到-180 dB(0 dB re 1 V/μPa)。

A vector hydrophone based on magnetoelectric(ME)effect and MEMS technology is proposed.The MEMS sensitive detection unit of vector hydrophone includes ME material,the MEMS component of eight cantilever beams-center mass block,and permanent magnets.This article uses a charge amplification signal processing circuit to process signals generated by sensitive detection units.By designing ME material,MEMS component and signal processing circuits,makes the vector hydrophones having high sensitivity during operation.The preparation of vector acoustic sensor is completed through acoustic potting,and the performance of vector hydrophone are tested.The test results indicate that the receiving sensitivity of the vector hydrophone is-180 dB(0 dB re 1 V/μPa)(@1 000 Hz).