AlCrNbSiTi高熵合金涂层高温水蒸气腐蚀研究

Study on the High Temperature Steam Corrosion of AlCrNbSiTi High Entropy Alloy Coatings

采用磁控溅射在不同偏压条件下制备AlCrNbSiTi高熵合金涂层,通过分析不同偏压涂层的形貌、化学成分、硬度,以及被水蒸气腐蚀后的涂层形貌,研究偏压对AlCrNbSiTi涂层结构及性能的影响。结果表明,偏压对涂层表面粗糙度的调控非常显著,150 V偏压的样品表面粗糙度只有3.35 nm;50 V偏压的样品具有最大硬度和弹性模量,分别为18.19 GPa和232.4 GPa。涂层水蒸气腐蚀失效机制为点腐蚀,偏压为50 V时腐蚀坑出现时间最晚,耐腐蚀性能最好。

Magnetron sputtering is used to prepare AlCrNbSiTi high entropy alloy coatings with different bias pressures,and the effect of bias pressure on the structure and properties of AlCrNbSiTi coatings is investigated by analyzing the morphologies,chemical compositions,hardnesses and morphologies of the coatings with different bias pressures after being corroded by water vapour.The results show that the bias voltage can regulate the surface roughness of the coatings significantly,and the surface roughness of the sample with a bias voltage of 150 V is only 3.35 nm.The sample with a bias voltage of 50 V exhibits the maximum hardness and elastic modulus of 18.19 GPa and 232.4 GPa,respectively.The failure mechanism of the coatings by water vapour corrosion is pitting corrosion,and the coating has the best corrosion resistance with a bias voltage of 50 V.